Steering, bipartite, and genuine tripartite entanglement in five-mode hybrid cavity electro-optomechanical systems

We propose a scheme to generate one-way steering, bipartite, and genuine tripartite entanglement in a five-mode hybrid cavity electro-optomechanical system consisted of an optical cavity, a mechanical resonator, and three microwave cavity modes with the help of a squeezed vacuum field. The optical cavity is pumped by a squeezed vacuum field. The mechanical resonator is formed by a freely vibrating silicon nitride membrane, which is a part of a capacitor in an inductor–capacitor circuit forming three microwave resonators. We find that there is robust entanglement and one-way steering between the optical cavity mode and microwave cavity modes in the presence of the squeezed vacuum field. Particularly, there is steady-state genuine tripartite entanglement between three microwave cavity modes, which is robust against thermal fluctuations. Our scheme could be useful for various quantum tasks based on hybrid electro-optomechanical systems fabricated on chips.