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June 12, 2019ACS NanoOpen Access

Postdeposition UV-Ozone Treatment: An Enabling Technique to Enhance the Direct Adhesion of Gold Thin Films to Oxidized Silicon

Hai Le The Roald M. Tiggelaar Erwin Berenschot Albert van den Berg Niels R. Tas Jan C. T. Eijkel

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Key Points

The study aims to investigate whether UV-ozone treatment can enhance the adhesion of gold thin films directly to oxidized silicon surfaces.
Treatment of oxidized silicon substrates with UV-ozone before gold film deposition.
Assessment of adhesion without using an intermediate metallic layer.
Application in biosensing and nanophotonic contexts.
The UV-ozone treated substrates showed significantly improved adhesion characteristics for gold thin films.
Direct adhesion facilitated without an intermediate metallic adhesion layer.

Implication

Demonstrates improved adhesion of gold thin films on oxidized silicon, indicating potential benefits for biosensing and nanophotonic applications.

Abstract

substrates without an intermediate metallic adhesion layer, which is critical for biosensing and nanophotonic applications.

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Cite This Study

The et al. (2019) studied this question.

synapsesocial.com/papers/6a23706bdfc351f7823a13a9 https://doi.org/10.1021/acsnano.9b01403

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Keep reading

Synapse has enriched 5 closely related papers on similar clinical questions. Consider them for comparative context:

1Certain Features of Thermal Deposition of Golden Films onto Mesoporous SiliconOriginal Research · 2025
2Realization of Atomically Uniform ALD-Al<sub>2</sub>O<sub>3</sub> and TiO<sub>2</sub> on SiO<sub>2</sub> and GeO<sub>2</sub> by UV-Ozone Treatment2024 · 3 citations
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4UV-OZONE Treatment for Suppressing Surface Damages on Silicon Solar Cells2024 · 2 citations
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