Certain Features of Thermal Deposition of Golden Films onto Mesoporous Silicon

Structural-morphological and chemical features of composite nanostructures obtained by vacuum-thermal gold deposition onto mesoporous silicon are studied in the work. Using scanning electron microscopy (SEM) atomic-force microscopy (AFM), IR Fourier spectroscopy (FTIR) and X-ray photoelectron spectroscopy (XPS) it was determined that deposition of gold resulted in formation of thin metal film (~200 nm), reproducing morphology of the porous silicon without its destruction. Partial penetration of gold into the pores was observed along with the conservation of its metal state (Au0) without formation of its chemical bonds with silicon. The obtained por-Si/Au heterostructures demonstrate a combination of the developed surface and chemical stability, that seems to be prospective for creation high-sensitive sensor devices.