Electrochemically Grown Wires for Individually Addressable Sensor Arrays

We report on the electrochemical growth of micro/nanowire devices using e-beam-patterned electrolyte channels, potentially enabling the controlled fabrication of individually addressable arrays. The concept of growing single wires and small arrays using this technique is demonstrated by single and double wires of Pd and polypyrrole with 500-nm and 1-μm widths up to 7-μm lengths and 200-nm thicknesses. The use of Pd wires as hydrogen sensors and polypyrrole wires as pH sensors is demonstrated.