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June 11, 2026AIP AdvancesOpen Access

Numerical study on the effect of the magnetic field generated by circular coils with rectangular sections on plasma characteristics in low-pressure capacitive RF argon discharges

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Authors

FSFeng ShiHGHaoyu GaoYXYonghao Xu

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Overview

Numerical study explores magnetic field impact on plasma in low-pressure argon discharges, highlighting density variations.

Key Points

  • This research aims to model how a magnetic field from circular coils affects plasma characteristics in low-pressure argon discharges.
  • Developed a magnetic field model using three-dimensional composite Simpson integration and finite difference method.
  • Created a two-dimensional axisymmetric plasma model incorporating the magnetic field.
  • Implemented the fourth-order Runge-Kutta method for temporal integration after discretizing the plasma model.
  • The magnetic field is stronger near the coils, decreasing with distance.
  • Increasing the magnetic field from 0 to 30 Gs raised electron density at the chamber center, with peak uniformity at 20 Gs.
  • Observations included increased electron heating, electron ohmic heating, and electron pressure heating at the chamber center.

Cite This Study

Shi et al. (2026) studied this question.

synapsesocial.com/papers/6a2a51d780c8f91e7f39dff1https://doi.org/10.1063/5.0335011
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