Tribological Behavior of Superhard TiAlSiCN Coatings Deposited by Combined HiPIMS with PDCMS

Applying functional hard protective coatings with friction-reducing and wear-resistant properties to optimize mechanical surfaces and interfaces can significantly enhance the reliability of operating components under extreme conditions and extend their service life. However, the difference of coating preparation technology often leads to great uncertainty in the improvement of the performance and lifetime of functional hard protective coatings. Hence, in this work, TiAlSiCN coatings were deposited at the substrate temperature of 300 °C by varying the C target power from 0 to 900 W using combined high-power impulse magnetron sputtering and pulsed DC magnetron sputtering. The TiAlSiCN coatings deposited at a C target power of 500 W containing the mixed phase of nc-TiAl(C)N, a-Si3N4 and a-C exhibit a simultaneous superhardness of 43.5 GPa and favorable toughness, benefiting from the fully dense microstructure and high surface integrity. The superhard TiAlSiCN coatings show excellent friction-reducing and wear-resistant properties with a low friction coefficient of about 0.1 and specific wear rate of 2.78 × 10−7 mm3·N−1·m−1 under dry reciprocating friction and wear tests. The improved friction and wear performance of TiAlSiCN coatings are mainly attributed to the increased cracking resistance and oxide-based films covering the superhard surface/interface.