Influence of sputtering power on microstructure and corrosion properties of magnetron-sputtered TiZrNbTaMoW refractory high-entropy alloy films in marine environments

Purpose The purpose of this paper is to develop extreme marine corrosion-resistant coatings and to fabricate TiZrNbTaMoW refractory high-entropy alloy thin films and clarify the effect of sputtering power. Design/methodology/approach TiZrNbTaMoW refractory high-entropy alloy thin films were fabricated by DC magnetron sputtering. The influence of sputtering power (80/100/120 W) on their microstructure and corrosion properties was investigated. Findings Sputtering power dominates film density, crystal orientation and composition uniformity. Uniform composition (deviation < 5%) and optimal corrosion resistance are both achieved at 100 W. Research limitations/implications This study only focuses on sputtering power without considering other magnetron sputtering parameters. Corrosion tests are only carried out in 3.5 Wt.% NaCl solution. Practical implications This work clarifies the sputtering power–microstructure–corrosion property relationship, offering new material and technical support for marine engineering protection. Originality/value The regulation mechanism of sputtering power on the films was systematically investigated for the first time, providing a new research basis for refractory high-entropy alloy coatings used in marine environments.