This research aims to explore the effects of high-energy electron irradiation on solid carbon dioxide and its applications in lithography and methane formation.
Investigated electron-induced reactions in solid carbon dioxide under high-energy irradiation.
Analyzed decomposition mechanisms and product formation during the experimental processes.
Observed significant lithography effects in carbon dioxide when exposed to electron bombardment.
Demonstrated formation of methane as a byproduct during the decomposition process.
Abstract
as a promising resist material and provide mechanistic insight into electron-stimulated decomposition in iEBL.