High-Precision MEMS Resonant Pressure Sensor for Real-Time Barometric Monitoring

Addressing the urgent demand for high-precision pressure measurement in real-time barometric monitoring, aerospace, and industrial control, this paper presents a high-accuracy MEMS resonant pressure sensor based on electrostatic excitation and piezoresistive detection. The sensor incorporates a symmetric double-ended fixed-finger comb-drive resonator structure, driven into stable vibration at its natural frequency by an alternating electrostatic force. Piezoresistors integrated at the root of the resonant beams transduce the mechanical vibration into a frequency output, enabling precise external pressure measurement. Experimental results show that the developed sensor achieves an accuracy of 0.009% FS over a pressure range of 0–350 kPa across an operating temperature span from −30 °C to 50 °C, with a room-temperature repeatability error below 0.008% FS, demonstrating excellent measurement stability. Building on this performance, a real-time atmospheric pressure monitoring experiment was conducted, yielding a mean absolute percentage error of less than 0.05%, highlighting the sensor’s potential for engineering practicality. This work provides an effective technique for a high-precision, high-stability resonant pressure sensor, with clear potential for deployment in real-time barometric monitoring, aerospace, and industrial control applications.