Demonstrates dynamic behaviors in microbeams under temperature-electric fields, suggesting improvements for MEMS applications.
The dynamic behaviors of a piezoelectric laminated viscoelastic microbeam undergoing free and forced vibrations under temperature-electric fields are investigated in this study. Electrostatic loads are classified into static electrostatic force (dominating free vibration) and alternating harmonic electrostatic force (exciting forced vibration). The nonlinear governing equation is established within the Euler-Bernoulli hypothesis, viscoelasticity and piezoelectric theories to incorporate the influences of electrostatic load, ambient temperature and applied piezoelectric voltage. The Runge-Kutta method is employed to characterize the time-dependent transient responses of free and forced vibration, and the harmonic balance method is adopted to derive the amplitude-frequency characteristics of steady-state forced vibration. The parametric studies indicate the damping coefficient, electric force, temperature and piezoelectric voltage considerably affect amplitude envelope for free vibration and amplitude-frequency characteristics for steady-state forced vibration. The present study provides a theoretical basis for the practical application and optimal structural design of similar microbeams in MEMS and high-precision instruments.
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Hu et al. (2026) studied this question.
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