White Paper - PFAS Research Priorities for Semiconductor Manufacturing

Produced by the PFAS Working Group of the Industrial Alliance for Semiconductors, this White Paper defines the research priorities needed to support the transition towards more sustainable semiconductor manufacturing while preserving Europe's technological competitiveness. It identifies key challenges related to the detection, monitoring, abatement, and replacement of PFAS, recognising their critical role in current manufacturing processes alongside growing environmental and regulatory pressures. The document provides recommendations to guide future research and innovation investments under the Chips Joint Undertaking and the 10th Framework Programme, with the objective of accelerating the development of effective monitoring technologies, advanced mitigation solutions, and high-performance PFAS alternatives.