Inverse Configuration Programming of MEMS Reconfigurable Terahertz Metamaterial for Universal Opto‐Logic

An inverse‐configuration framework is proposed for programmable terahertz opto‐logic using a MEMS reconfigurable electric split‐ring resonator (eSRR) platform. The eSRR integrates two independently electrostatically actuated cantilever groups, enabling a programmable transmission library with polarization‐dependent spectral responses. Instead of identifying logic behavior from manually selected spectra, the proposed opto‐logic configuration optimizer (OLCO) starts from a target Boolean function and automatically determines feasible device configurations and operating conditions. The framework enforces truth‐table correctness and ranks feasible solutions by robustness, bandwidth tolerance, and transmission contrast. Using the same eSRR platform, it realizes AND, OR, NAND, NOR, XOR, XNOR, BUFFER, and NOT gates, as well as a single‐input optical switch. This work establishes a systematic route for converting tunable THz spectral responses into reusable opto‐logic programming instructions.