Laser-Induced Irregular Hierarchical Interface Structures Offering High Sensitivity and Broad Detection Range of Flexible Pressure Sensors

within the 0-2.3 kPa interval. Moreover, the device demonstrated a rapid response time of 40 ms and a recovery time of 60 ms and maintained consistent sensing performance after a 3-week long-term durability test consisting for 20,000 loading-unloading cycles. Practical test verifies that sensors with hierarchical micro/nanostructures enable accurate and reliable detection of the full spectrum of signals generated by human daily living and various activities, ranging from subtle human physiological signals (e.g., voice and pulse waveforms), moderate motion signals (e.g., joint flexion and limb movement), to large dynamic load motions (e.g., walking). The well-balanced overall performance makes the sensor highly promising for wearable health monitoring and human-machine interaction. Furthermore, this work offers an innovative manufacturing route for the design and mass production of next-generation high-performance flexible pressure sensors.