Preparation of Diffuser-Type Micropumps Using PZT Thin Films Prepared by Metallo-Organic Compound Decomposition Process

This paper describes the simulation and preparation of the piezoelectric actuating diaphragm and the diffuser-type micropumps using PZT thin films and Si micromachining. The micropump is a stack of two layers bonded together: a silicon piece with a bimorph actuator using PZT thin films and a PMMA piece consisting of a pumping chamber, planar diffuser/nozzles and fluidic access holes. Those two pieces were bonded together by polyimide. PZT thin films have been prepared by a metallo-organic compound decomposition (MOD) process. The pumping chamber and fluidic channels were prepared on PMMA wafers by the hot embossing. The ferroelectric properties of PZT thin films were characterized by using TF ANALYZER2000 system. Keywords: MicropumpPZT thin filmSi micromachingBiosensor Acknowledgments This work was financially supported by the National Natural Science Foundation of China under Grant Nos. of 50728201, U0634006 and 50572086.