Effects of Annealing Conditions on Crystallization of Hexagonal Manganite Films

(Y,Yb)MnO 3 thin films were prepared on Pt(111)/TiO x /SiO 2 /Si substrates using alkoxy-derived precursor solutions. The annealing conditions were critical for crystallization of (Y,Yb)MnO 3 films. The (Y,Yb)MnO 3 films crystallized in vacuum were hexagonal phase and the orientation of the films changed with composition. The films crystallized in oxygen varied both the crystalline phase and orientation with composition. With Yb-rich composition, the films were single phase of hexagonal and showed high degree of c-axis orientation. Also, the morphologies of the films depended on the annealing conditions. The films crystallized in vacuum consisted of small grain and had smooth surface compared with the films crystallized in oxygen.