We present an advanced model of current transport in MIM structures and demonstrate its possible utilization in analyzing the leakage current in RuO2–TiO2–RuO2 metal-insulator-metal structures. The model comprehends an important role of traps present in high-κ materials in the transport of carriers through the insulator and can provide information about their spatial and energy distribution in the insulator. Through numerical analysis, a significant decrease of defects density in RuO2–TiO2–RuO2 MIM structures was identified after annealing at 300 °C.
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Racko et al. (2011) studied this question.
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