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June 1, 1967Journal of Applied Physics

Current Transport and Maximum Dielectric Strength of Silicon Nitride Films

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SSSimon M. SzeNational Yang Ming Chiao Tung University

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Simon M. Sze (1967) studied this question.

synapsesocial.com/papers/69dd95c680eea7d3f699cf88https://doi.org/10.1063/1.1710030
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