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We have fabricated single crystal chromium dioxide (CrO₂) films using chemical vapor deposition with chromyl chloride (CrO₂Cl₂) as a liquid precursor. Their electrical and magnetic properties have been investigated. These films are atomically smooth with a rms roughness of less than 5 for 1000 thick films. We have obtained a spin polarization of P=98. 4%, as determined by the technique of point-contact Andreev reflection. Magnetization and resistivity measurements on these films are in good agreement with those measured on films made with the CrO₃ solid precursor. The process using the liquid precursor is superior to other existing techniques for the preparation of single crystal single- and multilayers containing CrO₂, especially the structure of magnetic tunnel junctions.
Anguelouch et al. (Tue,) studied this question.