The synthesis and characterization of new iridium β-diketonate Lewis base adducts, [(β-diketonate)IrIL] and their use as precursors for CVD of Ir were reported. These monomeric species exhibit excellent volatility and stability. Iridium films were formed by CVD from (hfac)IrI(1,5-COD) in hydrogen onto various substrates at temperatures over the range 250−350 °C. These complexes represent a novel class of precursors for CVD of Ir and IrO2 films and for the formation of electrodes for ferroelectric memories.
No takes yet. Share an insight, caveat, or question.
Xu et al. (1998) studied this question.
Synapse has enriched 5 related papers. Consider them for comparative context: