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The integration of electro-optic (EO) films on an insulator/silicon (Si) substrate presents opportunities to enhance the performance of devices with novel electronic and photonic properties. Among these EO films, lead zirconate titanate (PZT) exhibits attractive optical properties and a particularly strong Pockels effect. Here, we demonstrate ultracompact EO modulators incorporating PZT thin films on the ubiquitous SiO 2 /Si substrate based on the photonic crystal nanobeam resonator. With a moderate Q -factor in the designed distributed feedback resonator, the modulator exhibits a notable tuning efficiency of 21.2 pm under an applying voltage of 1 V and a broad modulation bandwidth of 37 GHz while maintaining a device length of only 50 μm. The device can support an ultrafast modulation of up to 80 Gbit/s and meanwhile features excellent reliability with a negligible power shift at a bias of 3 V even after 60 min. The ultracompact and high-speed PZT modulators could pave the way toward realizing dense photonic integrated circuits for broad applications in data communication, microwave photonics, and quantum photonics.
Yu et al. (Wed,) studied this question.