CMOS Logic and Capacitorless DRAM by Stacked Oxide Semiconductor and Poly-Si Transistors for Monolithic 3-D Integration

In this work, we demonstrate capacitorless dynamic random access memory (DRAM) and complementary metal-oxide–semiconductor (CMOS) logic circuits by vertically stacked ZnO transistors and low-temperature polycrystalline silicon (LTPS) transistors on the same chip. High-performance ZnO transistors are achieved by atomic layer deposition, exhibiting a field-effect mobility (μ FE)of 35.2 cm2/V·s, subthreshold slope (SS) down to 71 mV/dec, and low off-state current (IOFF) < 2× 10^-19A/μm. Such ZnO transistors are used as write transistors in the capacitorless two transistor (2T0C) DRAM cell and as n-FETs in the CMOS logic gates, achieving long retention time with memory window (MW) (I_ state 1/I_ state 0) > 10^4after10^4s in DRAM (at a storage capacitance of 130 fF) and high inverter voltage gain of 181 V/V at VDD of 4.5 V in CMOS logic. Besides, a novel 2T0C DRAM with LTPS p-FET as read transistors is demonstrated, showing enhanced storage node voltage (VSN)enabled by coupling capacitance, providing a promising approach to improve retention and reduce operating voltage for 2T0C DRAM.