Sensitive nanowires: ZnO nanowire arrays are fabricated by nanoscale spacer lithography, a top-down paradigm consisting of photolithography, ZnO atomic-layer deposition, and low-damage dry etching. ZnO nanowire devices based on this technique (see picture) show good electrical transport and gas-sensing properties to various concentrations of H2 and CO.
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Ra et al. (2008) studied this question.
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