A micromachined thermoelectric (TE) power generator with a ceramic catalyst combustor operating at room temperature (RT) has been developed. A thermopile of 20 thin-film couples of B-doped Si 0.8 Ge 0.2 /Au and a Pt-loaded alumina ceramic thick-film catalyst combustor were integrated on a thin dielectric membrane, which was fabricated by bulk-Si wet etching. We have demonstrated a successful power generation of 0.26 µW using the micro-TE-generator with a fuel gas flow of 3 vol. % H 2 in air, 1000 ccm, at RT.
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Nishibori et al. (2006) studied this question.
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