Spatially resolved spectroscopy and electrical characterization of microplasmas and switchable microplasma arrays

Microwave resonators are used to generate microplasmas in atmospheric-pressure argon. We present spectroscopic and electrical measurements of these microplasmas for both a single resonator and a five-element resonator array with dc voltage-switchable power distribution. These measurements include gas temperatures from fits to rotational emission spectra and electron densities from Stark broadening, both resolved in two spatial dimensions. Peak gas temperatures are found to be near 900 K in the centre of the microplasmas, while electron densities peak near 3 × 10 14 cm −3 . Spectroscopically derived plasma densities are validated by comparison with electrical measurements of the complex plasma impedances. The plasma impedances shift the resonant frequencies and quality factors of the individual resonators, which in turn influence power distribution to the resonators. Data suggest that this feedback loop reinforces the electrical switching mechanism.