Split-ring resonator microplasma: microwave model, plasma impedance and power efficiency

The microstrip split-ring resonator (MSRR) microplasma source is analysed characterized using a microwave model of the device. Throughout the, experimental data for three MSRR designs are also presented. model identifies the key parameters that control the performance of the and results in the formulation of closed-form expressions useful for, analysing and comparing MSRR designs. Matching the characteristic impedance to the microplasma impedance is found be a key factor in the performance of these devices and it can be even critical than the quality factor of the ring resonator. Based on the, average rf electric fields of up to 4MVm−1 at 1Wof input power are to be generated in a 45μm gap device. Furthermore, the model is to determine the plasma impedance and thereby obtain information on properties of the microdischarge. Electron densities of the order of10(14) cm−3 are estimated in a 1W argon discharge at atmospheric pressure. on the values of the plasma impedance, it is also determined that up to70% of the power input to the MSRR is coupled to the electrons in the.