What question did this study set out to answer?

To analyze and mitigate periodic errors and fringe distortion in heterodyne laser interferometry to achieve subnanometer-level dimensional measurement accuracy.

April 1, 1989IEEE Transactions on Instrumentation and Measurement

Linear interpolation of periodic error in a heterodyne laser interferometer at subnanometer levels (dimension measurement)

View Full Paper

Ask AI

Bookmark

Authors

MTMitsuru TanakaKyushu University TYTatsuhito YamagamiKyoto University KNKeiji NakayamaJapan Fine Ceramics Center

Discussion

Member takes

Implication

Experimental study demonstrates 0.1-nanometer measurement accuracy using a 633-nanometer helium-neon interferometer, indicating effective periodic error mitigation for nanoscale metrology.

Key Points

To analyze and mitigate periodic errors and fringe distortion in heterodyne laser interferometry to achieve subnanometer-level dimensional measurement accuracy.
Evaluated an optical nonpolarization heterodyne interferometer configuration experimentally to analyze optical fringe distortion.
Implemented a 633-nm helium-neon (He-Ne) laser source and applied linear interpolation algorithms to reduce periodic measurement errors.
Identified and mitigated the optical fringe distortion mechanism within the nonpolarization setup.
Achieved a measurement accuracy of 0.1 nm using the 633-nm He-Ne heterodyne laser interferometer.

Cite This Study

Tanaka et al. (1989) studied this question.

synapsesocial.com/papers/6a6f1f8b26770c2b8ddfd74f https://doi.org/10.1109/19.192345

View Full Paper

Ask AI

Bookmark

Implication

Experimental study demonstrates 0.1-nanometer measurement accuracy using a 633-nanometer helium-neon interferometer, indicating effective periodic error mitigation for nanoscale metrology.

Linear interpolation of periodic error in a heterodyne laser interferometer at subnanometer levels (dimension measurement)

Discussion

Member takes

Implication

Key Points

Cite This Study

Linear interpolation of periodic error in a heterodyne laser interferometer at subnanometer levels (dimension measurement)

Discussion

Member takes

Implication

Key Points

Cite This Study

Also Consider

Also Consider