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June 1, 2016Review of Scientific Instruments

Development of a compact, fiber-coupled, six degree-of-freedom measurement system for precision linear stage metrology

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Authors

XYXiangzhi YuSGSteven R. GillmerMIT Lincoln LaboratorySWShane C. Woody

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Yu et al. (2016) studied this question.

synapsesocial.com/papers/6a6f200426770c2b8ddfd7a5https://doi.org/10.1063/1.4953335
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