We report a refractive index (RI) sensor based on the use of vertically etched silicon Bragg reflectors. The device is robust and performs measurements through tens of micrometers of liquid. A sensitivity of 907 nm/RIU (RI units) and a resolution of 1.7×10−5 RIU are obtained and are in good agreement with optical simulations. This resolution is the highest reported for a volume RI sensor integrated with a microfluidic system. Expected applications for the sensor in the fields of single cell characterization and chip based liquid chromatography are discussed.
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St-Gelais et al. (2009) studied this question.
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