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We describe the nearly-planar processing of two-dimensional vertical cavity laser arrays based on the selective conversion of AlAs to Al/sub x/O/sub y/. The individual lasers of 8×8 and 2×2 arrays are defined by native Al/sub x/O/sub y/ to achieve 4-μm square active regions on 12-μm center-to-center spacings. Interelement thermal coupling is characterized along with the optical mode structure.
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Huffaker et al. (1996) studied this question.
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