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February 1, 1972Japanese Journal of Applied Physics

Theoretical Considerations on Lateral Spread of Implanted Ions

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Authors

SFSeijiro FurukawaTokyo Institute of TechnologyHMHideki MatsumuraHiroshima UniversityHIHiroshi IshiwaraTokyo Institute of Technology

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Cite This Study

Furukawa et al. (1972) studied this question.

synapsesocial.com/papers/6a6f2f2ea2d7cf2e39c28908https://doi.org/10.1143/jjap.11.134
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