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, CBN (x = 0.28) thin film based waveguides are studied at 1550 nm optical communications wavelength. CBN thin films are deposited epitaxially on MgO substrates using Pulsed Laser Deposition and characterized by prism coupling to extract the refractive index and propagation loss. It is shown that the 2 µm-thick epitaxial CBN thin films have a refractive index close to the bulk form and the CBN planar waveguides have a propagation loss of 4.3 ± 0.5 dB/cm. 1 cm-long rib waveguide structures were fabricated using a high density plasma etching. Their propagation losses were measured by the cutback method at 8.4 ± 0.6 dB/cm.
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Vigne et al. (2016) studied this question.
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