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A model has been constructed for an electrostatic ultrasonic transducer with a uniformly grooved backplate. The membrane and the groove pattern of the transducer was divided into individual elements, and each element was treated as a Helmholtz resonator. The resonant frequency of the transducer can be calculated using one single resonator element. The calculated resonant frequencies were compared with experimental results.
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Hietanen et al. (1992) studied this question.
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