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September 1, 1976Journal of The Electrochemical Society

Annealing of Ion‐Implanted GaAs in a Controlled Atmosphere

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Authors

RMR. M. MalbonUniversity of Southern CaliforniaDLD. H. LeeHRL Laboratories (United States)JWJ. M. WhelanCalifornia Polytechnic State University

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Malbon et al. (1976) studied this question.

synapsesocial.com/papers/6a6f75b9a528af2d65c2ffc5https://doi.org/10.1149/1.2133088
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