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May 1, 1973Analytical Chemistry

Secondary ion emission for surface and in-depth analysis of tantalum thin films

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Authors

JMJ.M. MorabitoAT&T (United States)RLRuthan LewisGoddard Space Flight Center

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Morabito et al. (1973) studied this question.

synapsesocial.com/papers/6a6f75b9a528af2d65c2ffc9https://doi.org/10.1021/ac60328a037
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