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January 1, 1965Review of Scientific Instruments

Determination of Stress in Films on Single Crystalline Silicon Substrates

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Authors

RGR. GlangIBM (United States)RHR. A. HolmwoodIBM (United States)RRR. RosenfeldLaser Zentrum Hannover

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Glang et al. (1965) studied this question.

synapsesocial.com/papers/6a6f7637f44fa9f079dce919https://doi.org/10.1063/1.1719333
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