We have investigated the microstructural accommodation of nonstoichiometry in (BaxSr1−x)Ti1+yO3+z thin films grown by chemical vapor deposition. Films with y=0.04 and y=0.15 were studied by high-spatial resolution electron energy-loss spectroscopy, revealing changes in chemistry and local atomic environment both at grain boundaries and within grains as a function of titanium content. We find that excess titanium in the samples with y=0.15 segregates to the grain boundaries in addition to being partially accommodated in the grain interior.
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Stemmer et al. (1999) studied this question.
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