Characterization of thin, transparent and conductive TiN films prepared by radio frequency sputtering

Views Icon Views Article contents Figures & tables Video Audio Supplementary Data Peer Review Share Icon Share Twitter Facebook Reddit LinkedIn Tools Icon Tools Reprints and Permissions Cite Icon Cite Search Site Citation Midori Kawamura, Yoshio Abe, Katsutaka Sasaki; Characterization of thin, transparent and conductive TiN films prepared by radio frequency sputtering. J. Vac. Sci. Technol. A 1 January 1998; 16 (1): 200–202. https://doi.org/10.1116/1.580970 Download citation file: Ris (Zotero) Reference Manager EasyBib Bookends Mendeley Papers EndNote RefWorks BibTex toolbar search Search Dropdown Menu toolbar search search input Search input auto suggest filter your search All ContentAVS: Science & Technology of Materials Interfaces and ProcessingJournal of Vacuum Science & Technology A Search Advanced Search |Citation Search