Surface composition on a molybdenum sample has been observed during ECR discharge cleaning (ECR-DC) by Auger electron spectroscopy in JFT-2M. ECR-DC reduces oxygen levels to one-thrid of those before exposure within thirty minutes, and the molybdenum concentration increases up to a factor of three during ECR-DC. Carbon levels decrease once, then increase gradually. In the later phase Auger line shapes are similar to pure carbon. Sulfur, which appears under 120°C baking, surfaces from the stainless steel of the chamber as a result of the baking, and is sputtered by plasmas and deposited on the sample.
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Matsuzaki et al. (1986) studied this question.
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