A unique piezoelectric microactuator for the head-slider drive dual-stage actuator systems in magnetic disk drives has been developed. This microactuator is based on a rotating symmetrical structure and a symmetrical operation. The piezoelectric actuator elements used in the system have a simple rectangular multilayered structure. A prototype model with pico slider and head suspension has been tested to demonstrate 0.86 µm displacement at a dc applied voltage of 30 V and observed main resonant frequency of over 20 kHz. No fluctuation in flying height was observed.
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Kurihara et al. (2006) studied this question.
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