Long-range oxygen motion has been observed in Pt/Pb(Zr,Ti)O3/Ir thin-film structures after electrical fatigue cycling at room temperature. Through an exchange anneal, isotopic O18 was incorporated as a tracer into bare Pb(Zr,Ti)O3 (PZT) films, allowing secondary ion mass spectrometry measurements of the tracer profile evolution as a function of the number of polarization reversals. Observation of O18 tracer redistribution during voltage cycling, which is presumably mediated by oxygen vacancy motion, was found to be strongly dependent upon the thermal history of the film. However, there was no strong correlation between the extent of O18 tracer redistribution and the extent of polarization suppression induced by voltage cycling. Our results suggest that oxygen vacancy motion plays, at most, a secondary role in ferroelectric fatigue of PZT thin films.
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Schloss et al. (2002) studied this question.
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