Dual Storage Mechanism in Nanoscale Solid-State Lithium-Ion Supercapacitors

High Resolution Image Download MS PowerPoint Slide In this study, we focus on the fabrication and characterization of on-chip micro-supercapacitors (MSCs) utilizing atomic layer deposition (ALD)-synthesized lithium phosphorus oxynitride (LiPON) as solid-state electrolyte. Our investigation primarily revolves around the electrochemical properties and applications of these MSCs. We demonstrate the successful synthesis of 20 nm-thin LiPON films with an ionic conductivity of 0.18 μS·cm –1 enabled by ALD. The synthesized MSCs exhibit good performance metrics, including a capacitance density of 500 nF·mm –2 at 100 mV·s –1, 3 V voltage stability, and excellent cycling stability over ten thousands of cycles. Furthermore, we explore the broadband (frequency from DC to GHz) behavior of MSCs through radiofrequency (RF) tests, revealing distinct storage mechanisms across different frequency ranges. This characterization sheds light on the potential applications of MSCs in rectifier circuits, voltage-controlled oscillators (VCOs), and power delivery networks (PDNs), showcasing their versatility and effectiveness in diverse electronic systems.