A distributed model has been derived for MIM capacitors using a simple coupled-transmission-line approach. The model has been compared with measured S-parameter data from MIM capacitors having different aspect ratios fabricated on 4-mil GaAs substrates. The agreement is very good. The derived model will converge to the first-order capacitor model, generally given in the literature, under a few assumptions.
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J. Mondal (1987) studied this question.
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