The estimation of backscattering effects in electron-induced Auger spectra

When an electron beam is used to initiate Auger electron spectra, the secondary electrons backscattered from the solid can also cause ionization and Auger emission. This leads to an enhancement of the Auger yield, allowed for by defining a backscattering factor. This paper presents a simple model which enables the backscattering factor and energy dependence of the ionization cross section to be measured. Results are reported of measurements made on silver and silicon specimens.