Answers are grounded in this paper and cite their sources.
Sputtering-yield data for metals are obtained by drilling holes in thin target foils with magnetically separated, dense hydrogen beams. Results for H2+ and H3+ at 7 keV are presented for Be, Al, Ti, V, Fe, Co, Ni, Cu, Zr, Mo, Pd, Ag, Ta, W, Re, Ir, Pt, and Au. Results for protons can be inferred from those for molecular ions since the hydrogen atoms sputter independently. Typical results at 7 keV in atoms/ion are for 0.032/H2+, 0.046/H3+, and for Cu 0.025/H+, 0.065/H2+, and 0.105/H3+.
No takes yet. Share an insight, caveat, or question.
Kenknight et al. (1964) studied this question.
Synapse has enriched 10 related papers. Consider them for comparative context: