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A new apparatus equipped with an ECR oxygen plasma source, a co-evaporation system of Y, Ba and Cu and a differential pumping system was developed. YBa 2 Cu 3 O 7- x superconducting films were obtained at a substrate temperature of 450–500°C. The critical temperatures of films deposited on SrTiO 3 , MgO and Si substrates were 87 K, 80 K and 63 K, respectively. These properties were closely related to the crystallinity of the film.
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Aida et al. (1989) studied this question.
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