The microstructure of (001) YBa2CU3O7-03B4 and YBa2Cu3-xMxO7-03B4 (M = Zn or Fe) thin films grown by inverted cylindrical magnetron sputtering was investigated by means of electron mi- croscopy. The imperfections present in the films are discussed. Special attention is paid to nanoscale Y2O3 inclusions. The density of [001] Y2O3 precipitates was studied in YBa2CU3-xZnxO7-03B4 and YBa2Cu3-xFexO7-03B4 thin films prepared under identical conditions. The density decreases for in- creasing Zn-content and is unaffected in case of Fe-substitution.
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Verbist et al. (1996) studied this question.
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