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Preparation of superconducting niobium nitride (NbN) films was attempted by two kinds of electron-beam deposition methods. One is a molecular beam epitaxy (MBE) method using a radical beam source (RBS). The other is a reactive deposition method assisted by radio frequency plasma. The films grown by the RBS-MBE method showed a clear superconducting transition. The observed maximum superconducting transition temperature ( T c ) was 9.5 K.
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Kawaguchi et al. (1991) studied this question.
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