Scanning Tunneling Microscopy and Nanolithography on a Conducting Oxide, Rb 0.3 MoO ₃

The scanning tunneling microscope has been used to image and modify the surface of a conducting oxide (Rb(0.3)MoO(3))in ambient atmosphere. Individual octahedral MoO(6) units of the oxide can be imaged, and under certain conditions defects can be created in the surface that are stable in air. The ability to produce nanometer-sized structures on the surface of an oxide is demonstrated and discussed with reference to nanolithographic applications.