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An inchworm system with a new type of clamping mechanism has been made for a coarse positioner in a scanning tunneling microscope. The clamping mechanism operates by means of springs and piezoelectric actuators. This system can move a probe tip transversely and longitudinally in the horizontal plane, and the sample vertically, in steps, with a range of 8 mm in each direction.
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Takata et al. (1989) studied this question.
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