Optical intensity modulator with three−dimensional waveguide

A LiTaO3 optical waveguide modulator, in which a laser beam is confined in both transverse dimensions, has been fabricated. The three−dimensional waveguiding operation was achieved by using an ion−etched thin core slab and a slit metal cladding. Waveguide porperties for 0.633− and 1.15−μm laser beams and dc and rf modulation performance for a 1.15−μm beam are described.